Plasma immersion ion implantation characteristics with...

Journal of Plasma Physics 2015 / 06 Vol. 81; Iss. 3

Plasma immersion ion implantation characteristics with q-nonextensive electron velocity distribution

Safa, N. Navab, Ghomi, H., Niknam, A. R.
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Volume:
81
Language:
english
Journal:
Journal of Plasma Physics
DOI:
10.1017/s0022377814000981
Date:
June, 2015
File:
PDF, 580 KB
english, 2015
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