Novel End-point Detection Method by Monitoring Shear Force...

MRS Proceedings 2009 / 1 Vol. 1157

Novel End-point Detection Method by Monitoring Shear Force Oscillation Frequency for Barrier Metal Polishing in Advanced LSI

Gu, Xun, Nemoto, Takenao, Sampurno, Yasa Adi, Cheng, Jiang, Theng, Sian Nie, Philipossian, Ara, Zhuang, Yun, Teramoto, Akinobu, Ito, Takashi, Sugawa, Shigetoshi, Ohmi, Tadahiro
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Volume:
1157
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1157-E13-03
Date:
January, 2009
File:
PDF, 579 KB
english, 2009
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