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Influence of Cooling Rate after High Temperature Annealing on Deep Levels in High-Purity Semi-Insulating 4H-SiC
Gällström, Andreas, Magnusson, Björn, Carlsson, Patrick, Son, N.T., Henry, Anne, Beyer, Franziska C., Syväjärvi, Mikael, Yakimova, Rositza, Janzén, ErikVolume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.371
File:
PDF, 1.27 MB
english, 2007