Semiconductor Pressure Sensors as Seen by a Physicist
Trzeciakowski, Witold, Litwin-Staszewska, Elżbieta, Perlin, PiotrVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.32S1.328
Date:
January, 1993
File:
PDF, 953 KB
1993