Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly
Warisawa, Shin’ichi, Mino, Hiroyuki, Kometani, Reo, Ishihara, SunaoVolume:
1312
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.136
Date:
January, 2011
File:
PDF, 361 KB
english, 2011