Reduction of CV Hysteresis in Metal/High-k MISFETs Using...

MRS Proceedings 2004 / 1 Vol. 811

Reduction of CV Hysteresis in Metal/High-k MISFETs Using Flash Lamp Post Deposition Annealing

Matsuki, Takeo, Akasaka, Yasushi, Hayashi, Kiyoshi, Noguchi, Masataka, Yamashita, Koji, Syoji, Hideyuki, Torii, Kazuyoshi, Kasai, Naoki, Arikado, Tsunetoshi
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Volume:
811
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-811-D3.13
Date:
January, 2004
File:
PDF, 104 KB
english, 2004
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