ARCHIVE Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture 1989-1996 (vols 203-210)
2008 / 1 Vol. 222; Iss. 1
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Automatic nanohandling station inside a scanning electron microscope
Fatikow, S, Wich, T, Sievers, T, Jähnisch, M, Eichhorn, V, Mircea, J, Hülsen, H, Stolle, ChVolume:
222
Language:
english
Journal:
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
DOI:
10.1243/09544054JEM836
Date:
January, 2008
File:
PDF, 771 KB
english, 2008