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Self-formation of Ti-rich Layers at Cu(Ti)/low-k Interfaces
Kohama, Kazuyuki, Ito, Kazuhiro, Tsukimoto, Susumu, Mori, Kenichi, Maekawa, Kazuyoshi, Murakami, MasanoriVolume:
1079
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1079-N03-08
Date:
January, 2008
File:
PDF, 1.08 MB
english, 2008