Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial...

Materials Science Forum 2003 Vol. 433-436

Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes

Kimoto, Tsunenobu, Danno, Katsunori, Fujihira, Keiko, Shiomi, Hiromu, Matsunami, Hiroyuki
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.197
File:
PDF, 281 KB
english, 2003
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