Off-Angle Dependence of Characteristics of 4H-SiC-Oxide...

Materials Science Forum 2006 Vol. 527-529

Off-Angle Dependence of Characteristics of 4H-SiC-Oxide Interfaces

Hijikata, Yasuto, Yaguchi, Hiroyuki, Yoshida, Sadafumi, Takata, Y., Kobayashi, K., Nohira, H., Hattori, T.
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.1003
File:
PDF, 451 KB
english, 2006
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