Optimization of mechanical properties of thin free-standing...

MRS Proceedings 2004 / 1 Vol. 820

Optimization of mechanical properties of thin free-standing metal films for RF-MEMS

Toonder, Jaap M.J. den, Dijken, Auke R. van
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
820
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-820-O8.3
Date:
January, 2004
File:
PDF, 618 KB
english, 2004
Conversion to is in progress
Conversion to is failed