Precision Polishing of Micro Mold by Using Piezoelectric...

Advanced Materials Research 2011 / 8 Vol. 325

Precision Polishing of Micro Mold by Using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism

Chee, Sze Keat, Suzuki, Hirofumi, Okada, Mutsumi, Yano, Takeshi, Higuchi, Toshiro, Lin, Wei Min
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Volume:
325
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.325.470
Date:
August, 2011
File:
PDF, 2.30 MB
english, 2011
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