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Structure and Optical Properties of Magnetron Sputtered SiOx Layers with Silicon Nanoparticles
Khomenkova, L., Korsunska, N., Stara, T., Goldstein, Y., Jedrzejewski, J., Savir, E., Sada, C., Emirov, Y.Volume:
272
Year:
2007
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.272.87
File:
PDF, 951 KB
english, 2007