Etch Rate Modification of SiO[sub 2] by Ion Damage

Etch Rate Modification of SiO[sub 2] by Ion Damage

Charavel, R., Raskin, J.-P.
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Volume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2200307
File:
PDF, 81 KB
english, 2006
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