A Model of Cu-CMP

MRS Proceedings 2004 / 1 Vol. 816

Paul, Ed, Brusic, Vlasta, Sun, Fred, Zhang, Jian, Vacassy, Robert, Kaufman, Frank

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Volume:

816

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-816-K2.2

Date:

January, 2004

File:

PDF, 87 KB

english, 2004

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