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A Model of Cu-CMP
Paul, Ed, Brusic, Vlasta, Sun, Fred, Zhang, Jian, Vacassy, Robert, Kaufman, FrankVolume:
816
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-816-K2.2
Date:
January, 2004
File:
PDF, 87 KB
english, 2004