Layer Transfer and Simultaneous Activation of Phosphorus...

MRS Proceedings 2012 / 1 Vol. 1426

Layer Transfer and Simultaneous Activation of Phosphorus Atoms in Silicon Films by Near-Infrared Semiconductor Diode Laser Irradiation

Kobayashi, Yoshitaka, Sakaike, Kohei, Nakamura, Shogo, Ikeda, Mitsuhisa, Ohta, Akio, Higashi, Seiichiro
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Volume:
1426
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.862
Date:
January, 2012
File:
PDF, 319 KB
english, 2012
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