Residual Stress Analysis of Al Alloy Thin Films by X-Ray Diffraction as a Function of Film Thickness
Shute, Carla J., Cohen, J. B., Jeannottea, D. A.Volume:
130
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-130-29
Date:
January, 1988
File:
PDF, 239 KB
english, 1988