Redistribution of Implanted Species in Polycrystalline Silicon Films on Silicon Substrate
Salman, F., Arnold, J., Zhang, Peng, Chai, Guan Gyu, Stevie, Fred A., Chow, L.Volume:
264
Year:
2007
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.264.7
File:
PDF, 369 KB
english, 2007