Efficacy of Damage Annealing in Advanced Ultra-Shallow...

MRS Proceedings 2008 / 1 Vol. 1070

Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing

Timans, Paul J, Hu, Yao Zhi, Gelpey, Jeff, McCoy, Steve, Lerch, Wilfried, Paul, Silke, Bolze, Detlef, Kheyrandish, Hamid
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Volume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E04-03
Date:
January, 2008
File:
PDF, 159 KB
english, 2008
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