Effect of Al Doping on the Reliability of ALD HfO2

Bhuyian, M., Misra, D., Tapily, K., Clark, R., Consiglio, S., Wajda, C., Nakamura, G., Leusink, G.

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Volume:

Language:

english

Journal:

ECS Transactions

DOI:

10.1149/06408.0029ecst

Date:

August, 2014

File:

PDF, 564 KB

english, 2014

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