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Thin-Film Piezoelectric Actuators of Nonuniform Thickness and Nonhomogeneous Material Properties for Modulating Actuation Stress
Liu, Nan, Yang, Jiashi, Chen, WeiqiuVolume:
22
Language:
english
Journal:
Mechanics of Advanced Materials and Structures
DOI:
10.1080/15376494.2013.864431
Date:
October, 2015
File:
PDF, 831 KB
english, 2015