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Diffusion Barrier Property of Sputtered Molybdenum Nitride Films for Dram Copper Metallization
Park, Jong-Wan, Lee, Jeong-YoubVolume:
403
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-403-687
Date:
January, 1995
File:
PDF, 1.27 MB
english, 1995