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Glancing Angle Deposition of Thin Films (Engineering the Nanoscale) || Glancing Angle Deposition Systems and Hardware
Hawkeye, Matthew M., Taschuk, Michael T., Brett, Michael J.Volume:
10.1002/97
Year:
2014
Language:
english
DOI:
10.1002/9781118847510.ch7
File:
PDF, 504 KB
english, 2014