The Effect of Aluminum Nitride-Silicon Carbide Alloy Buffer...

Materials Science Forum 2006 Vol. 527-529

The Effect of Aluminum Nitride-Silicon Carbide Alloy Buffer Layers on the Sublimation Growth of Aluminum Nitride on SiC (0001) Substrates

Gu, Z., Edgar, J.H., Raghothamachar, Balaji, Dudley, Michael, Zhuang, Dejin, Sitar, Zlatko
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.1497
File:
PDF, 429 KB
english, 2006
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