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Chemical Vapor Deposition and Defect Characterization of Silicon Carbide Epitaxial Films
Chen, Yi, Dhanaraj, Govindhan, Chen, Hui, Vetter, William, Dudley, Michael, Zhang, HuiVolume:
891
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0891-EE12-11
Date:
January, 2005
File:
PDF, 1.94 MB
english, 2005