SISO run-to-run feedback controller using triple EWMA...

International Journal of Production Research 2002 / 01 Vol. 40; Iss. 13

SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes

Fan, Shu-Kai S., Jiang, Bernard C., Jen, Chih-Hung, Wang, Chien-Chih
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Volume:
40
Language:
english
Journal:
International Journal of Production Research
DOI:
10.1080/00207540210141652
Date:
January, 2002
File:
PDF, 428 KB
english, 2002
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