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Distinguishing between Individual Contributions to the Via Resistance in Carbon Nanotubes Based Interconnects
Fiedler, H., Toader, M., Hermann, S., Rodriguez, R. D., Sheremet, E., Rennau, M., Schulze, S., Waechtler, T., Hietschold, M., Zahn, D. R. T., Schulz, S. E., Gessner, T.Volume:
1
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.027206jss
Date:
October, 2012
File:
PDF, 1.29 MB
english, 2012