Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using...

Key Engineering Materials 2013 / 12 Vol. 596

Fabrication of 25-nm-Pitched CoPt Magnetic Dot Arrays Using 30-keV-Electron Beam Drawing, RIE and Ion-Milling

bin Mohamad, Zulfakri, Huda, Miftakhul, Komori, Takuya, Alip, Rosalena Irma, Zhang, Hui, Yin, You, Hosaka, Sumio
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Volume:
596
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.596.92
Date:
December, 2013
File:
PDF, 652 KB
english, 2013
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