High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure
Chang, Ting-Kuo, Lin, Ching-Wei, Tsai, Chun-Chien, Lu, Jian-Hao, Chen, Bo-Ting, Cheng, Huang-ChungVolume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1830372
File:
PDF, 284 KB
english, 2005