Designing Photoresist Systems for Microlithography in Carbon Dioxide
Flowers, Devin, Hoggan, Erik, DeSimone, Joseph M., Carbonell, RubenVolume:
705
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-705-y7.8
Date:
January, 2001
File:
PDF, 53 KB
english, 2001