Sputtering of silicon and its compounds in the electronic...

Radiation Effects 1983 / 01 Vol. 70; Iss. 1-4

Sputtering of silicon and its compounds in the electronic stopping region

Qiu, Yuanxun, Griffith, J. E., Meng, Wen Jin, Tombrello, T. A.
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Volume:
70
Language:
english
Journal:
Radiation Effects
DOI:
10.1080/00337578308219218
Date:
January, 1983
File:
PDF, 305 KB
english, 1983
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