Fidelity of Holographic Lithography for Fabrication of 3D SU-8 Photonic Structures and How to Minimize Distortion by Optical Design
Zhu, Xuelian, Xu, Yongan, Cheng, Shih-Chieh, Yang, ShuVolume:
1182
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1182-EE13-07
Date:
January, 2009
File:
PDF, 483 KB
english, 2009