DONOR GENERATION IN PLASMA TREATED SILICON

Modern Physics Letters B 1989 / 04 Vol. 3; Iss. 6

DONOR GENERATION IN PLASMA TREATED SILICON

KUSMARTSEVA, O.E., SENCHUKOV, F.D.
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Volume:
3
Journal:
Modern Physics Letters B
DOI:
10.1142/S0217984989000765
Date:
April, 1989
File:
PDF, 157 KB
1989
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