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ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Challenges and Solutions of Extremely Thin SOI (ETSOI) for CMOS Scaling to 22nm Node and Beyond
Cheng, Kangguo, Khakifirooz, Ali, Kulkarni, Pranita, Edge, Lisa F., Reznicek, Alexander, Adam, Thomas, He, Hong, Seo, Soon-cheon, Kanakasabapathy, Sivananda, Schmitz, Stefan, Holmes, Steven, Johnson,Year:
2010
Language:
english
DOI:
10.1149/1.3360735
File:
PDF, 461 KB
english, 2010