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ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - (Invited) Site-Specific and High-Spatial-Resolution Scanning Spreading Resistance Microscopy and Its Applications in Si Technology
Zhang, Li, Koike, Mitsuo, Takeno, ShiroYear:
2011
Language:
english
DOI:
10.1149/1.3568863
File:
PDF, 2.89 MB
english, 2011