![](/img/cover-not-exists.png)
Thermo-Mechanical Reliability of 3D-integrated Microstructures in Stacked Silicon
Wunderle, Bernhard, Mrossko, R., Wittler, O., Kaulfersch, E., Ramm, P., Michel, B., Reichl, H.Volume:
970
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-0970-y02-04
Date:
January, 2006
File:
PDF, 1.95 MB
english, 2006