Thermo-Mechanical Reliability of 3D-integrated...

MRS Proceedings 2006 / 1 Vol. 970

Thermo-Mechanical Reliability of 3D-integrated Microstructures in Stacked Silicon

Wunderle, Bernhard, Mrossko, R., Wittler, O., Kaulfersch, E., Ramm, P., Michel, B., Reichl, H.

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Volume:

970

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-0970-y02-04

Date:

January, 2006

File:

PDF, 1.95 MB

english, 2006

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