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Growth of TiO2 thin films on Si(001) and SiO2 by reactive high power impulse magnetron sputtering
Magnus, F., Agnarsson, B., Ingason, A. S., Leosson, K., Olafsson, S., Gudmundsson, J. T.Volume:
1352
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.1010
Date:
January, 2011
File:
PDF, 251 KB
english, 2011