Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films
Hunks, William, Chen, Philip S., Chen, Tianniu, Stender, Matthias, Stauf, Gregory T., Maylott, Leah, Xu, Chongying, Roeder, Jeffrey F.Volume:
1071
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1071-F09-11
Date:
January, 2008
File:
PDF, 136 KB
english, 2008