Vertical finFET with Salicide Contact for Potential Power...

Vertical finFET with Salicide Contact for Potential Power Applications

Zhai, Y., Mathew, L., Rao, R., Sreenivasan, S. V., Willson, C. G., Banerjee, S. K.
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Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0151410jss
Date:
August, 2014
File:
PDF, 853 KB
english, 2014
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