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Vertical finFET with Salicide Contact for Potential Power Applications
Zhai, Y., Mathew, L., Rao, R., Sreenivasan, S. V., Willson, C. G., Banerjee, S. K.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0151410jss
Date:
August, 2014
File:
PDF, 853 KB
english, 2014