Crystallization of Amorphous Silicon Thin Films Using...

Electrochemical and Solid-State Letters 2007 Vol. 10; Iss. 5

Crystallization of Amorphous Silicon Thin Films Using Self-Limiting ALD of Nickel Oxide

So, Byung-Soo, You, Yil-Hwan, Kim, Kyu-Hun, Hwang, Jinha, Cho, Wontae, Lee, Sun Sook, Chung, Taek-Mo, Lee, Young Kuk, Kim, Chang Gyoun, An, Ki-Seok, Kim, Young-Cheol, Lee, Young-Ho, Seo, Won-Seon
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Volume:
10
Year:
2007
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2666721
File:
PDF, 410 KB
english, 2007
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