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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Sheet Resistance Increase of Shallow Doped Silicon during Native Oxidation in Air
Kalkofen, Bodo, Burte, Edmund P.Volume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356260
File:
PDF, 269 KB
english, 2006