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Melting and resolidification dynamics of a-Si and poly-Si thin films during excimer laser annealing
Hatano, Mutsuko, Moon, Seungjae, Lee, Minghong, Suzuki, Kenkichi, Grigoropoulos, Costas P.Volume:
558
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-558-193
Date:
January, 1999
File:
PDF, 1021 KB
english, 1999