Application of Inline X-ray Metrology for Defect...

ECS Transactions 2013 / 03 Vol. 50; Iss. 6

Application of Inline X-ray Metrology for Defect Characterization of III-V/Si Heterostructures

Hung, P. Y., Wormington, M., Matney, K., Ryan, P., Dunn, K., Wang, A., Hill, R., Wong, M.-H., Price, J., Wang, W.-E., Bersuker, G.
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Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05006.0341ecst
Date:
March, 2013
File:
PDF, 658 KB
english, 2013
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