Diffusion of ion-implanted Boron and Silicon in Germanium
Uppal, Suresh, Willoughby, A. F. W., Bonar, J. M., cowern, N. E. B., Morris, R. J. H., Dowsett, M. G.Volume:
809
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-809-B8.10
Date:
January, 2004
File:
PDF, 115 KB
english, 2004