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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Hafnium Oxide Etching Using Hydrogen Chloride Gas
Habuka, Hitoshi, Kobori, Yoshitsugu, Yamaji, Masahiko, Horii, Sadayoshi, Kunii, YasuoYear:
2009
Language:
english
DOI:
10.1149/1.3118956
File:
PDF, 466 KB
english, 2009