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Investigation of Nitrogen Atoms in Low-Pressure Nitrogen Plasmas Using a Compact Electron-Beam-Excited Plasma Source
Tada, Shigekazu, Takashima, Seigou, Ito, Masafumi, Hamagaki, Manabu, Hori, Masaru, Goto, ToshioVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4691
Date:
July, 2002
File:
PDF, 296 KB
english, 2002