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Role of Cl/Si Ratio in the Low-Temperature Chloro-Carbon Epitaxial Growth of SiC
Melnychuk, Galyna, Kotamraju, Siva Prasad, Koshka, YaroslavVolume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.205
Date:
January, 2013
File:
PDF, 728 KB
english, 2013