Role of Cl/Si Ratio in the Low-Temperature Chloro-Carbon...

Role of Cl/Si Ratio in the Low-Temperature Chloro-Carbon Epitaxial Growth of SiC

Melnychuk, Galyna, Kotamraju, Siva Prasad, Koshka, Yaroslav
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.205
Date:
January, 2013
File:
PDF, 728 KB
english, 2013
Conversion to is in progress
Conversion to is failed