Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial...

Materials Science Forum 2004 Vol. 457-460

Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation

Panknin, D., Godignon, Phillippe, Mestres, Narcis, Polychroniadis, E.K., Stoemenos, J., Ferro, Gabriel, Pezoldt, Jörg, Skorupa, Wolfgang
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Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.1515
File:
PDF, 1.11 MB
english, 2004
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