Al/Si Ohmic Contacts to p-Type 4H-SiC for Power Devices

Materials Science Forum 2000 Vol. 338-342

Al/Si Ohmic Contacts to p-Type 4H-SiC for Power Devices

Kassamakova, Liliana, Kakanakov, Roumen, Kassamakov, Ivan, Nordell, Nils, Savage, Susan, Svedberg, Erik B., Madsen, Lynnette D.
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Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1009
File:
PDF, 344 KB
2000
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