ECS Transactions [ECS 220th ECS Meeting - Boston, MA...

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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - SiGe Alloys Sensitivity to Front-End Surface Preparations

Briend, Guillaume, Garnier, Philippe, Jeanjean, Damien, Breil, Nicolas, Gourhant, Olivier, Dutartre, Didier, Tanon-Pellissier, Denis, Campidelli, Yves, Bidal, Gregory, Levy, Didier
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Year:
2011
Language:
english
DOI:
10.1149/1.3630842
File:
PDF, 172 KB
english, 2011
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